JPS6314570U - - Google Patents
Info
- Publication number
- JPS6314570U JPS6314570U JP10634486U JP10634486U JPS6314570U JP S6314570 U JPS6314570 U JP S6314570U JP 10634486 U JP10634486 U JP 10634486U JP 10634486 U JP10634486 U JP 10634486U JP S6314570 U JPS6314570 U JP S6314570U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support stand
- semiconductor wafer
- cathode electrode
- contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10634486U JPS6314570U (en]) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10634486U JPS6314570U (en]) | 1986-07-11 | 1986-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6314570U true JPS6314570U (en]) | 1988-01-30 |
Family
ID=30981612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10634486U Pending JPS6314570U (en]) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6314570U (en]) |
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1986
- 1986-07-11 JP JP10634486U patent/JPS6314570U/ja active Pending